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分析了SiO_2+PSG+SiO_2三层钝化增透膜的生长工艺,对实验结果进行了热力学理论探讨;给出了高频电容-电压和光学透过特性曲线,并与SiO_2膜做了比较;对系统的限制因素进行了细致的研究.
The growth process of three layers of passivating SiO_2 + PSG + SiO_2 passivation coatings was analyzed. The experimental results were discussed in terms of thermodynamics. The high frequency capacitance - voltage and optical transmittance curves were given and compared with that of SiO_2. The limitations of the system conducted a detailed study.