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Energy transport in femtosecond laser ablation can be divided into two stages: 1) laser energy absorptionby electrons during the pulse irradiation, and 2) phase change stage that absorbed energy redistributes in bulk materialsleading to material removals. We review challenges in understanding the phase change process mainly for the femtosecondablation of wide bandgap materials at the intensities on the order of 1013～1014 W/cm2.Thermal vaporizationand Coulomb explosion are two major mechanisms considered for material removals. Based on the discussions ofenergy transport, the estimation equations and unsolved problems for threshold fluence and ablation depth are presented.
Energy transport in femtosecond laser ablation can be divided into two stages: 1) laser energy absorptionby electrons during the pulse irradiation, and 2) phase change stage that absorbed energy redistributes in bulk materials toading material removals. We review challenges in understanding the phase change process mainly for the femtosecond ablation of wide bandgap materials at the intensities on the order of 1013-1014 W / cm2.Thermal vaporization and Coulomb explosion are two major mechanisms considered for material removals. Based on the discussions ofenergy transport, the estimation equations and unsolved problems for threshold fluence and ablation depth are presented.