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基于标量衍射理论 ,首先得出线宽增加情况下 4阶二元光学元件衍射效率的解析式 ;并以 4阶、8阶二元光学元件为例 ,进行计算机模拟并系统分析线宽增加和线宽减小两种情况下 ,线宽误差对二元光学元件衍射效率的影响。指出线宽误差对二元光学元件衍射效率影响较大。模拟计算结果对二元光学元件的制作提供重要的理论指导。
Based on the scalar diffraction theory, the analytical formula of the diffraction efficiency of the fourth-order binary optical element with increasing linewidth is obtained first. The fourth-order and the eighth-order binary optical elements are taken as examples to simulate and systematically analyze the increase of linewidth and linewidth Reduce the two cases, the line width error of the binary optical element diffraction efficiency. It is pointed out that the error of line width has a great influence on the diffraction efficiency of binary optics. The simulation results provide important theoretical guidance for the fabrication of binary optics.