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研究了反应溅射氧化铝薄膜对CO-30Cr-6Al-0.5Y涂层抗高温氧化性能的影响。结果表明,3.5μm厚的Al_2O_3薄膜可大大改善CoCrAlY涂层抗1000～1100℃的氧化性能。在1000℃下,C0-30Cr-6Al-0.5Y涂层表面可以形成保护性良好的Al_2O_3膜,在此情况下,反应溅射Al_2O_3膜可大幅度降低CoCrAlY涂层的氧化速率,在1100℃,CoCrAlY涂层己不能形成单一具有保护性的Al_2O_3膜,而预先沉积氧化铝薄膜的COCrAlY涂层表面的氧化物主要由α-Al_2O_3组成,从而使CoCrAlY涂层的抗氧化性能大大提高。
The effect of reactive sputtered aluminum oxide film on the high temperature oxidation resistance of CO-30Cr-6Al-0.5Y coating was investigated. The results show that the 3.5μm thick Al_2O_3 thin film can greatly improve the oxidation resistance of CoCrAlY coating at 1000 ~ 1100 ℃. The Al 2 O 3 film can be formed on the surface of C0-30Cr-6Al-0.5Y coating at 1000 ℃. In this case, reactive sputtering of Al 2 O 3 film can greatly reduce the oxidation rate of CoCrAlY coating. At 1100 ℃, CoCrAlY coating can not form a single protective Al 2 O 3 film, while the pre-deposited alumina film COCrAlY coating surface oxide mainly composed of α-Al 2 O 3, so that the oxidation resistance of CoCrAlY coating greatly improved.