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利用计算流体力学软件Fluent对纳米颗粒射流超光滑加工的流场分布特点进行了流体动力学分析。基于仿真结果对去除函数的变化规律进行了研究,通过具体实验来对流体动力学仿真结果进行了验证。搭建了纳米射流抛光装置,利用该装置对熔石英元件进行了加工。原子力显微镜观测结果表明熔石英元件表面粗糙度RMS值由初始的0.680 nm减小到了0.307 nm,实现了超光滑加工。
The computational fluid dynamics software Fluent was used to analyze the flow field distribution characteristics of the ultra-smooth jet of nanoparticle. Based on the simulation results, the changing law of the removal function was studied. The fluid dynamics simulation results were verified through the specific experiments. Set up a nano-jet polishing device, the use of the device fused quartz components were processed. Atomic force microscopy observation results show that the RMS value of the surface roughness of the fused silica decreases from 0.680 nm to 0.307 nm, achieving ultra-smooth processing.