论文部分内容阅读
本文从可压缩气体动力学出发,推导得到原(分)子团束中的原(分)子速度,从而算得原(分)子团的动能。作者用自己设计的离化集团束装置产生银原子团,并用圆筒型静电偏转能量分析器CAD—127测量了银原子团的能量。由此得到从1650K的高温坩埚喷口经绝热膨胀所形成的银原子团中含300～500个银原子的原子团约占60%。作者还用扫描俄歇微探针(SAM)分别研究了银蒸汽、银原子团、离化银原子团三种束流淀积于硅片时,银原子沿平行于硅片平面所作的迁移运动,发现三种束流中的银原子有明显不同的迁移长度。实验还表明;由这三种束流淀积形成的银膜同基体的结合力和金—半接触特性也有所不同。
Starting from the compressible gas dynamics, we derive the original (sub) sub-velocity in the original (sub) cluster and calculate the kinetic energy of the original (sub) cluster. The authors used their own ionization cluster beam device to generate silver clusters and measured the energy of silver clusters using the cylindrical electrostatic deflection energy analyzer CAD-127. This results in about 60% of the atomic groups containing 300 to 500 silver atoms in the silver clusters formed by the adiabatic expansion of the high-temperature crucible nozzle at 1650K. The authors also used scanning Auger microprobe (SAM) to study the migration of silver atoms parallel to the plane of the silicon wafer when the three streams of silver vapor, silver and ionized silver were deposited on the silicon wafer, respectively. The silver atoms in the three beams have significantly different migration lengths. Experiments also show that the silver films formed by these three kinds of beam deposition are different from the substrate in bonding force and gold-semi-contact characteristics.