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报道了用喷雾热分解法在不同温度下制备二氧化锡薄膜, 发现其在325℃时已晶化, 得到四方相多晶SnO2。这种薄膜具有明显湿敏效应。测量表明, 较高湿度区阻值随湿度变化近似线性, 从高湿到低湿平均为每上升1% RH, 阻值下降8.8Ω, 响应速度小于1 分钟, 阻值恢复较容易
It was reported that a thin film of tin dioxide was prepared by spray pyrolysis at different temperatures and was found to crystallize at 325 ° C to produce tetragonal polycrystalline SnO2. This film has a significant moisture-sensitive effect. Measurements showed that the resistance of the higher humidity region changed linearly with humidity, rising 1% RH from high humidity to low humidity, the resistance decreased by 8.8Ω, and the response speed was less than 1 minute, the resistance recovery was easier