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采用直流脉冲磁控反应溅射技术,在不同氧氩比(GFR)条件下玻璃衬底上制备了一系列掺铝氧化锌(AZO)薄膜,并利用X射线衍射、扫描电子显微镜和分光光度计从宏观应力和微观晶格畸变的角度研究了GFR对薄膜结构、表面形貌和光学特性的影响.制备的多晶AZO薄膜呈现了明显的ZnO-(103)择优取向,这归结于3 h薄膜沉积过程中伴随的退火引起的薄膜晶面能转变.随着GFR的增大,AZO薄膜内宏观拉应力先增大到最大值,随后宏观压应力随着GFR的继续增大而增大.薄膜中的宏观应力明显随着GFR从拉应力向压应力转变.这与晶格微观畸变诱导的微观应力的研究结果趋势恰恰相反.随着GFR的增加,薄膜在可见光区的平均透射率先增加后减小,薄膜晶粒尺寸诱导的晶界散射是影响薄膜透射率的主导机制.
A series of AZO films were prepared on glass substrates under different oxygen and argon ratio (GFR) conditions by direct current pulsed magnetron reactive sputtering technique. X - ray diffraction, scanning electron microscopy and spectrophotometer The effects of GFR on the structure, surface morphology and optical properties of the films were investigated from the perspective of macroscopic stress and microscopic lattice distortion.The prepared polycrystalline AZO films showed the preferential orientation of ZnO- (103) due to the 3 h film With the increase of GFR, the macroscopic tensile stress in AZO film first increases to the maximum value, and then the macroscopic compressive stress increases with the GFR increasing. The macroscopic stress obviously changes with the GFR from tensile stress to compressive stress, which is contrary to the research results of micro-stress induced by lattice micro-distortion.With the increase of GFR, the average transmittance of the film in the visible region increases first and then decreases Small, thin film grain size-induced grain boundary scattering is the dominant mechanism that affects the film transmittance.