论文部分内容阅读
为适应对真空及压力器件密封性日益增长的要求 ,尤其是确保小体积密封真空器件的长期可靠性 ,研制了一套超灵敏度检漏系统。这套全金属的超高真空系统主要由分子泵、离子泵、无油前级泵、消气剂泵和高性能的四极质谱计等组成 ,由于采用了现代先进的真空技术 ,仅在几个小时内就可达到 10 - 6 Pa的工作压强。该系统有两种检漏模式 ,累积模式用于漏率小于 5× 10 - 1 2 Pa· m3/s漏孔的检漏 ,更大的漏率则用动态检漏模式。实验结果表明该系统的最小可检漏率可达 1× 10 - 1 5Pa· m3/s。
In order to meet the growing demand for tightness of vacuum and pressure devices, and in particular to ensure the long-term reliability of small volume sealed vacuum devices, an ultra-sensitive leak detection system was developed. This all-metal ultra-high vacuum system is mainly composed of molecular pump, ion pump, oil-free foreline pump, getter pump and high-performance quadrupole mass spectrometer. Due to the modern advanced vacuum technology, Working hours can reach 10 - 6 Pa pressure. There are two leak detection modes in this system. The cumulative mode is used for leak detection of leakages with a leak rate of less than 5 × 10 - 12 Pa · m 3 / s. For larger leak rates, dynamic leak detection mode is used. The experimental results show that the minimum leak rate of the system can reach 1 × 10 - 15Pa · m3 / s.