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真空科学与电子学之间历来有着极为密切的关系,近年来,微电子学和光电子学得到了迅猛的发展和长足的进步.电子器件和电子电路(包括集成电路和集成光路)出现了三种趋向,即尺寸越来越小,组成越来越复杂;速度越来越高;组件所容纳的器件越来越多.所有这些趋向都要求应用更多的真空条件和真空分析测试手段,诸如真空过程工艺技术,建立在薄膜技术基础上元器组合件的制造,以及原位分析和测试等等.本文的描述可概括为三个方面:第一,真空科学与技术在电子学领域应用的历史演变和当前的状况;第二,讨论真空科学技术与微电子学的关系;最后,综述了用于微电子学方面的各种典型真空系统.
There has always been a close relationship between vacuum science and electronics. In recent years, microelectronics and optoelectronics have seen rapid development and great progress. There have been three types of electronic devices (including integrated circuits and integrated optical circuits) The trend, ie smaller and smaller, more complex components, higher speeds, more and more components housed by the components, all of which require the application of more vacuum conditions and vacuum analytical tests such as vacuum Process technology, the establishment of the thin film technology based on the manufacture of component assemblies, and in situ analysis and testing, etc. The description of this article can be summarized in three aspects: First, the history of vacuum science and technology applications in the field of electronics Evolution and current conditions; second, to discuss the relationship between vacuum science and technology and microelectronics; and finally, to summarize various typical vacuum systems for microelectronics.