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根据介电润湿(EWOD)原理,建立了电润湿力与驱动电压的关系,提出一种基于聚酰亚胺介质的单平面微液滴驱动芯片设计方案。该芯片利用MEMS技术在铬版玻璃上分别制作出金属微电极阵列和聚酰亚胺介质膜,再使用聚四氟乙烯分散液进行疏水处理,通过在电极阵列和微液滴之间直接施加电压以实现微液滴的驱动。对单平面微液滴驱动芯片的液滴介电润湿效应进行了仿真分析,结果表明仅使用疏水层便可观察到明显的介电润湿现象,接触角测量值与理论值吻合较好。使用该驱动芯片成功实现了微液滴的稳定传输,传输速度达到3.31 mm/s左右,并在实验基础上分析了传输速度与驱动电压幅值和频率的关系。
According to the principle of dielectric wetting (EWOD), the relationship between electrowetting power and driving voltage was established, and a single planar micro droplet driving chip based on polyimide medium was proposed. The chip uses MEMS technology to produce a metal microelectrode array and a polyimide dielectric film respectively on chrome glass, and then uses a polytetrafluoroethylene dispersion for hydrophobic treatment. By directly applying a voltage between the electrode array and the micro-droplets In order to achieve the drive of the microdroplets. The dielectric wetting effect of droplet on a single planar micro-droplet driving chip is simulated and the results show that the obvious wettability of dielectric can be observed only by the hydrophobic layer. The measured value of contact angle is in good agreement with the theoretical value. Using this driver chip, the stable transmission of microdroplets has been successfully achieved with the transmission speed of about 3.31 mm / s. The relationship between the transmission speed and the amplitude and frequency of the driving voltage is analyzed based on the experiment.