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介绍了自行开发的移相式数字波面干涉仪的原理和特点 ,仪器主要用于激光棒材料波前畸变测试 ,仪器口径为 30mm ,精度优于λ/ 2 0 ,重复性优于λ/ 5 0。仪器硬件具有四个特点 :变倍、调焦、光通量控制、调整和测试转换 ;软件包建立在WINDOWS98平台上 ,进行干涉图采集、处理、波面图形绘制。输出结果形象直观 ,整个操作简单方便快捷 ,测试过程 2 6s。仪器还可测量晶体材料折射率均匀性、晶体元件面形、角度、平行度等。通过测试比对 ,数据与ZYGO结果一致
The principle and characteristics of the self - developed phase shifting digital surface wave interferometer are introduced. The instrument is mainly used for testing the wavefront aberration of the laser rod material. The diameter of the instrument is 30mm, the accuracy is better than λ / 20 and the repeatability is better than λ / 5 0. Instrument hardware has four characteristics: zoom, focus, flux control, adjustment and test conversion; software package is built on the WINDOWS98 platform for interferogram acquisition, processing, wave surface rendering. Intuitive visual output results, the entire operation is simple and convenient, test process 26s. Instruments can also measure the refractive index uniformity of crystal materials, crystal element surface shape, angle, parallelism and so on. By testing the alignment, the data is consistent with the ZYGO results