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研制了一种小体积、低成本及可扩展的低电压1×8微机械电子系统(MEMS)光开关。由5V电压驱动电磁机构动作,带动微反射镜绕直径100μm转轴转动,实现开关的状态切换。开关时间2ms,插入损耗<0.8dB,具有断电自锁功能。器件制作采用微细电火花加工(EDM)技术。应用有限元方法进行了器件开关时间的理论分析,器件的结构优化设计,并与实测结果进行了比较。
A small size, low cost and scalable low voltage 1 × 8 micro-electro-mechanical system (MEMS) optical switch is developed. By the 5V voltage drive electromagnetic mechanism action, driven micro-mirror around the diameter of 100μm rotation axis to achieve the switch state switch. Switching time 2ms, insertion loss <0.8dB, with power-off self-locking function. Device manufacturing using micro-EDM (EDM) technology. The finite element method is used to analyze the switching time of the device and the structure optimization of the device. The results are compared with the measured results.