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一、前言微位移测量是精密测试的一个重要课题,如压电陶瓷、磁致伸缩材料变形特性的测量,材料膨胀系数的测试,温度稳定性的测量,变形或振动等引起的位移测量都属于这一范畴。微位移测量量程不大,但需要很高的灵敏度及精度,往往需要分辨几十个埃(A)乃至几个埃的变化。常用的双光束干涉方法由于条纹亮暗无明显的界线,不易读数及精确瞄准,所以不能满足微位移测量的要求。本文介绍一种主要由压电陶瓷驱动的多光束干涉扫描方法。采用这种方法能使精度提高、读数简单和易于数字化。
I. Introduction Micro-displacement measurement is an important subject of precision testing. For example, the measurement of the deformation characteristics of piezoelectric ceramics and magnetostrictive materials, the testing of the coefficient of thermal expansion, the measurement of temperature stability, deformation caused by deformation or vibration all belong to This category. Micro-displacement measurement range is not large, but the need for high sensitivity and accuracy, often need to distinguish dozens of Egyptian (A) or even a few changes. The commonly used method of double-beam interference can not meet the requirements of micro-displacement measurement due to no obvious boundary between bright and dark fringes, difficulty of reading and accurate aiming. This article describes a multi-beam interference scanning method that is driven mainly by piezoceramic. Using this method can improve accuracy, simple readings and easy to digitize.