使用有限元方法分析了硅基二氧化硅光波导的应力分布 ,结果表明波导主要受横向压应力影响 ,而且应力主要集中在芯区和包层的界面附近 .根据波导的应力分布 ,得出波导的折射率分布 ,并使用 ADI全矢量方法求解出波导的模式折射率 .比较考虑应力和未考虑应力的波导模式折射率可以得出 :波导的双折射效应主要是由于波导应力引起的 ,阵列波导光栅的偏振相关与中心波长的漂移是受阵列波导的应力分布的影响 The stress distribution of silicon-based silica optical waveguide was analyzed by finite element method. The results show that the waveguide is mainly affected by the transverse compressive stress, and the stress is mainly concentrated near the interface between the core and cladding. According to the stress distribution of the waveguide, And using ADI full vector method to solve the mode refractive index of the waveguide.Comparing the refractive index of the waveguide mode considering the stress and not considering the stress, it can be concluded that the birefringence effect of the waveguide is mainly caused by the stress of the waveguide, the array waveguide The polarization-dependent shift of the grating from the center wavelength is affected by the stress distribution of the arrayed waveguide