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阐述了一种新型的He Ne激光位移传感器 ,具有自校准功能以及没有原理上的误差。利用频率分裂技术 ,将一个纵模间隔分为 4个宽度相等的区间 ,在这 4个区间内激光器具有不同的光功率输出。当一个频率移动过这样的一个区间 ,相当于激光器的一个腔镜移动了λ/ 8。可移动的反射镜与被测工件相连。这样 ,一支He Ne激光器变成了一个不用干涉现象的位移传感器 ,其测量范围可达 10mm ,测量精度可达 0 .0 79μm ,并具有判向的功能。
A new type of He Ne laser displacement sensor is described with self-calibration function and no principle error. Using the frequency splitting technique, a longitudinal mode interval is divided into four equally spaced intervals, in which the lasers have different optical power outputs. When a frequency moves through such a range, a mirror equivalent of the laser is shifted by λ / 8. Movable mirror connected to the workpiece under test. In this way, a He Ne laser becomes a displacement sensor without interference, measuring range up to 10mm and measuring accuracy up to 0.079μm with directional function.