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在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后的沉积中,随着甲烷浓度的增加,金刚石膜表面的晶粒大小是逐渐减小的。当甲烷浓度达到20%以上时,金刚石膜生长面晶粒呈现菜花状的小晶团,膜体侧面已经没有了粗大的柱状晶,而是呈现出光滑的断口,对该层进行拉曼谱分析显示,位于1145 cm-1附近有一定强度的散射峰出现。这说明所沉积的晶粒全部变为纳米级尺寸。
On a 30kW dc Arc P lasm a Jet CVD apparatus, a mixed gas of Ar-H2-CH4 was used to deposit micro-sized Mo on the Mo substrate by adjusting the methane concentration and controlling other deposition parameters / Nanocomposite self-supporting diamond film. Experiments show that when the deposition of the microdiamond film layer is completed, the grain size of the diamond film surface gradually decreases with the increase of the methane concentration in the subsequent deposition. When the concentration of methane reached more than 20%, the diamond grains grew like cauliflower on the growth surface, and no coarse columnar crystals appeared on the side of the film, but showed a smooth fracture, and the layer was analyzed by Raman spectroscopy The scattering peak at 1145 cm-1 shows some intensity. This shows that the deposited grains all become nano-scale size.