,High Performance Micro CO Sensors Based on ZnO-SnO2 Composite Nanofibers with Anti-Humidity Charact

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ZnO-SnO2 composite nanofibers are synthesized via an electrospinning method and characterized by x-ray diffraction,scanning electron microscopy,and transmission electron microscopy.Micro sensors are fabricated by spinning the nanofibers on Si substrates with Pt signal and heater electrodes.The sensors with small areas (600 μm × 200 μm) can detect CO down to 1 ppm at 360C.The corresponding sensitivity,response time,and recovery time are 3.2,6s,and 11 s,respectively.Importantly,the sensors can operate at high humidity conditions.The sensitivity only decreases to 2.3 when the sensors are exposed to 1 ppm CO at 95% relative humidity.These excellent sensing properties are due to combining the benefits of one-dimensional nanomaterials and the ZnO-SnO2 grain boundary in the nanofibers.
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