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报道了一种长波长的 In P基谐振腔 (RCE)光电探测器 .采用选择性湿法刻蚀 ,制备出基于 In P/空气隙的分布布拉格反射镜 ,并将该结构的反射镜引入 RCE光电探测器 .制备的器件在波长 1.5 10 μm处获得了约 5 9%的峰值量子效率 ,以及 8GHz的 3d B响应带宽 ,其中器件的台面面积为 5 0 μm× 5 0 μm.
A long wavelength In P based resonator (RCE) photodetector is reported.The distributed Bragg reflector based on In P / air gap is prepared by selective wet etching, and the reflector of this structure is introduced into the RCE The photodetector was fabricated with a peak quantum efficiency of about 59% at a wavelength of 1.5 10 μm and a 3dB response bandwidth of 8 GHz with a device surface area of 50 μm × 50 μm.