纳米压印光刻经学术和行业团体近十年的研究之后,已逐渐开始对半导体行业产生引导作用。简单地讲,纳米压印是把一个1×的模板压进一个柔性层,从而在衬底上制作图形。斯坦福大学的电子工程教授 Nano-imprint lithography by academic and industry groups after nearly a decade of research, has gradually begun to guide the semiconductor industry. Briefly, nanoimprinting imposes a 1 × template onto a flexible layer to create a pattern on the substrate. Stanford University professor of electronic engineering