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最近,Ta_2O_5薄膜已应用于集成光学器件和太阳能电池上作抗反射涂层.这些应用是鉴于薄膜的高化学稳定性,特别是具有相当低的光传输损耗的光学特性.但这些薄膜都是无定型的.本研究是采用反应性直流二极溅射工艺,用金属钽靶和氩、氧混合气体在石英基片上获得结晶性薄膜,本研究提供了制得取向性和无定型Ta_2O_5薄膜的有关沉积条件,并首次观察到取向性Ta_2O_5薄膜的压电现象.成功地用叉指换能器在Ta_2O_5薄膜上激励出声表面波.
Recently, Ta_2O_5 thin films have been used as antireflective coatings on integrated optics and solar cells due to the high chemical stability of the films, especially optical properties with a relatively low optical transmission loss. However, none of these films are This study is the use of reactive DC sputtering process, the use of metal tantalum target and argon, oxygen mixed gas to obtain a crystalline film on a quartz substrate, the present study provides the orientation and amorphous Ta_2O_5 film The piezoelectric phenomenon of the oriented Ta 2 O 5 thin film was observed for the first time.The SAW was successfully excited on the Ta 2 O 5 thin film by using an interdigital transducer.