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在PHI-590型扫描俄歇微探针上扩展了出现电势谱的测量功能,此出现电势谱具有上靶电子束流小(几个微安)、空间分辨率高(小于一个微米)的特点,并可用在线计算机控制测量过程。
The appearance of a potential spectrum measurement function on the PHI-590 Scanning Auger microprobe extends the feature that the potential spectrum has a small target electron beam current (a few microamperes) and a high spatial resolution (less than one micron) , And available online computer control measurement process.