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基于非均匀膜理论提出一种存在微缺陷的介质基底的折射率分层模型,将基底依次分为表面层、亚表面层和体材料层,其中表面层和亚面层分别等效为折射率服从统计分布的非均匀膜,将它们分别再次细分为N1和N2个子层,每一子层均视为均匀介质膜.应用光学薄膜特征矩阵法对其进行理论分析,并对单层介质膜的光学性能进行数值计算.研究结果表明基底的表面和亚表面微缺陷改变了薄膜和基底的等效折射率,导致了准Brewster角和组合反射率与理想情形的偏离.同时这些微缺陷也改变了光在薄膜和基底中的传播特性,因此反射相移和相位差均偏离理想情形.在研究基底的微缺陷对多层介质膜光学性能影响的分析和计算时,该模型同样适用.
Based on the theory of inhomogeneous film, a refractive index hierarchical model of micro-defect medium substrate is proposed. The substrate is divided into surface layer, sub-surface layer and bulk material layer in turn. The surface layer and the sub-surface layer are equivalent to refractive index According to statistical distribution of non-uniform film, they are subdivided into N1 and N2 sub-layers, each sub-layer are considered as a uniform dielectric film. The application of optical film characteristics of the matrix method for its theoretical analysis, and single-layer dielectric film The results show that the surface and subsurface microdefects of the substrate change the equivalent refractive index of the film and the substrate, resulting in the deviation of the quasi-Brewster angle and the combined reflectivity from the ideal case.These microdefects also change The propagation characteristics of light in the film and the substrate reflect the phase shift and the phase difference are deviated from the ideal case.The model is also applicable in the study and analysis of the influence of substrate microdefects on the optical properties of multilayer dielectric films.