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我们用Sol-Gel法制备了非晶钛酸铅膜。研究了各种温度下离子注入对其结构的影响。发现注入温度较低时,铅在非晶钛酸铅膜中聚集并结晶;当注入温度较高时,离子注入阻碍晶态钛酸铅的形成而使膜中出现晶态铅和氧化铅。
We prepared the amorphous lead titanate film by Sol-Gel method. The effect of ion implantation on the structure at various temperatures was investigated. It was found that when the injection temperature is low, lead accumulates and crystallizes in the amorphous lead titanate film. When the injection temperature is high, ion implantation hinders the formation of crystalline lead titanate and causes crystalline lead and lead oxide in the film.