介绍了一种在 sol- gel薄膜表面形成光栅结构的方法。用扫描电子显微镜 (SEM)表征了薄膜的表面形貌 ,用原子力显微镜 (AFM)测量了光栅结构的深度。测试了这种结构表面的衍射特性 ,并对结果进行了分析 A method of forming a grating structure on the surface of a sol-gel film is described. The surface morphology of the film was characterized by scanning electron microscopy (SEM) and the depth of the grating structure was measured by atomic force microscopy (AFM). The diffraction characteristics of this structure were tested and the results were analyzed