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目前,对圆光栅分度误差一般都采用莫尔条纹电信号比相的办法来测量,这是符合实际工作状况的。然而,如何从相位计检测的数据中提取光栅分度误差的信息,应该对它作深入的、定量的分析并给出数学表达式;此外,笔者认为采用单参数(指用最大直径误差)评定,得到的信息太少而丢失的信息太多,实在可惜!不给出误差函数,也不利于实现预报和控制的目的,故有改进的必要。本文着重对这方面问题作些探讨。
At present, the circular grating indexing error are generally used Moire fringe signal phase ratio approach to measure, which is in line with the actual working conditions. However, how to extract the information of grating graduation error from the data of phase detector should be analyzed in depth and given the mathematical expression. In addition, I believe that using a single parameter (referring to the maximum diameter error) It is a pity that too little information will be lost and too much information will be lost. Without giving an error function, it is also not conducive to the purpose of forecasting and control. Therefore, it is necessary for improvement. This article focuses on some issues in this area to explore.