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采用射频磁控溅射方法制备非晶 Dy Fe Co磁光薄膜。样品的克尔回线、转矩曲线的测试显示 ,薄膜具有优良的磁和磁光性能。退火研究表明 ,随着退火时间的增加 ,矫顽力下降 ,垂直磁各向异性能减少 ,但克尔角变化不明显 ,其内在机制与薄膜中的微缺陷和应力的弛豫过程有关。
Preparation of amorphous Dy Fe Co magneto-optical thin film by RF magnetron sputtering. Kerr test samples, torque curve test showed that the film has excellent magnetic and magneto-optical properties. Annealing studies show that with the increase of annealing time, the coercivity decreases and the perpendicular magnetic anisotropy decreases, but the Kerr angle does not change obviously. The intrinsic mechanism is related to the micro-defects and stress relaxation in the films.