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一种新型的低成本、小体积的电磁驱动微机电系统可调光衰减器 ,可用于密集波分复用系统中各信道的动态增益平衡。该器件采用电磁线圈驱动绕 10 0微轴转动的微反射镜 ,运动部件行程极小。驱动电压为 0～ 8V ,工作范围 0～ 35dB ,动态响应时间小于 2ms ,插入损耗小于 0 .8dB ,回波损耗小于 - 5 0 .5dB。器件采用微细电火花加工技术制作 ,加工精度为微米量级 ,技术成熟 ,工艺简单 ,易于批量生产。采用有限元分析软件ANSYS对器件的结构建模 ,对电磁场及衰减曲线进行了理论分析 ,并与实测数据进行了比较 ,得出了相当满意的结果
A Novel Low-cost, Small-Volume, Electromagnetically-Driven MEMS Optically Tunable Optical Attenuator for Dynamic Gain Equalization in Dense Wavelength Division Multiplexing Systems. The device uses a micro-mirror driven by a magnet coil to rotate around a 100 micro-axis. The travel of the moving parts is extremely small. The driving voltage is 0 ~ 8V, the working range is 0 ~ 35dB, the dynamic response time is less than 2ms, the insertion loss is less than 0.8dB, and the return loss is less than -5.0.5dB. Devices using micro-EDM technology, processing accuracy of microns, mature technology, simple process, easy mass production. The finite element analysis software ANSYS was used to model the structure of the device, the electromagnetic field and the decay curve were theoretically analyzed and compared with the measured data, and the results were quite satisfactory