论文部分内容阅读
微构件的弹性系数影响微型传感器的静态和动态力学特性 ,为了精确的测试和评定微构件的力学特性 ,利用纳米硬度计通过微悬臂梁的弯曲试验来测量其力学特性。运用该方法可精确测量微悬臂梁纳米级弯曲变形 ,在研究微悬臂梁的纯弯曲变形过程中 ,必须考虑压头在微悬臂梁上的压入以及微悬臂沿宽度方向的挠曲。试验研究表明 ,多晶硅微悬臂梁的纯挠曲与载荷成很好的线性关系 ,通过线性关系计算得到梁的弹性模量为 [1± (2 .9%～ 6 .3% ) ]× 15 6 GPa。
The elastic coefficient of the micro-component affects the static and dynamic mechanical properties of the micro-sensor. In order to accurately test and evaluate the mechanical properties of the micro-component, the mechanical properties of the micro-cantilever are measured by bending the micro-cantilever using a nano-hardness tester. This method can accurately measure the micro-cantilever nanoscale bending deformation. In the study of micro-cantilever pure bending deformation process, it is necessary to consider the pressure on the microcantilever and the micro-cantilever bending along the width direction. The experimental results show that the pure bending of polysilicon micro-cantilever has a good linear relationship with the load, and the elastic modulus of the beam calculated from the linear relationship is [1 ± (2.9% -6.3%)] × 15 6 GPa.