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纳米压印中模板和胶层的脱离是关系到纳米压印质量好坏的关键过程。本文利用Ansys有限元软件对纳米压印的脱模过程进行连续脱模和分段脱模数值模拟,研究胶层脱模过程中的性态变化。获得胶层截面的有效应力分布和最大有效应力随脱模距离不同的发展变化趋势。结果显示连续脱模过程时胶层内最大有效应力总趋势降低,但有波动。为优化脱模过程,本文将脱模位移分为五个阶段进行分段脱模,研究表明分段脱模应力小于连续脱模,更利于保护模板和胶层,减小损耗。
Nano-imprint in the template and the separation of the adhesive layer is related to the quality of nano-imprint the key process. In this paper, Ansys finite element software was used to simulate the mold releasing process of the nanoimprint continuously and the numerical simulation of the segmented mold release to study the change of the state during the mold release process. Obtained the cross-section of the effective stress distribution and maximum effective stress with the stripping distance of different development trends. The results show that the total effective stress in the rubber layer during the continuous demolding process has a tendency of decreasing but fluctuating. In order to optimize the process of demoulding, this paper divided the mold release displacement into five stages for demoulding. The research shows that the segmented demoulding stress is less than the continuous demoulding, which is more conducive to the protection of the template and the adhesive layer and the loss reduction.