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介绍了一种制作含有固体润滑剂的自润滑微电子机械的新方法。这种自润滑微电子机械克服了液体润滑剂在微电子机械中的副作用，能够有效地减少微电子机械接触面的微摩擦力和微电子机械的磨损，从而延长微电子机械的寿命。测试了以ＭｏＳ２作为固体润滑剂的Ｎｉ微电子机械的摩擦系数和磨损，结果显示加入ＭｏＳ２的微电子机械的摩擦系数与磨损仅为未加ＭｏＳ２同类微机械的２／３～１／２与１／１０～３／４。
A new method of making self - lubricating microelectronic machinery containing solid lubricant is introduced. The self-lubricating microelectronic machinery overcomes the side effect of the liquid lubricant in the microelectronic machinery and can effectively reduce the micro friction and the wear of the microelectromechanical contact surface, so as to prolong the service life of the microelectronic machinery. The friction coefficient and wear of Ni microelectromechanical equipment with MoS2 as solid lubricant were tested. The results showed that the friction coefficient and wear of microelectronic machinery with MoS2 were only 2/3 ~ 1/2 and 1 / 10 ~ 3/4.