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《真空镀膜技术与设备》是东北工学院真空技术教研室李云奇教授等七位同志为满足教学需要组织编写的教材,1989年出版后得到一些院校师生及科研生产单位的欢迎,本书很快售尽,现根据读者要求予以重印。 本书共有11章,分别为引论真空镀膜基础、真空蒸发镀膜、真空溅射镀膜、真空离
“Vacuum Coating Technology and Equipment” is a teaching material prepared by seven comrades such as Professor Li Yunqi of the Vacuum Technology Teaching and Research Office of Northeast Institute of Technology to meet the needs of teaching. After being published in 1989, it has been welcomed by teachers, students, scientific research and production units of some colleges and universities. Sold out, according to the readers request to be reprinted. The book consists of 11 chapters, respectively, the introduction of vacuum coating base, vacuum evaporation coating, vacuum sputtering coating, vacuum