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针对仿生微纳导航传感器对380～520nm波长的探测要求,从Lambert定理出发,设计了一种蓝紫光探测器,并对器件的结构和工艺进行了优化分析。利用SOI硅片上薄的单晶硅层,实现了较高的蓝紫光响应度,同时抑制了可见光中的长波和近红外光的响应度。当SOI硅片的器件层厚度为3μm时,450nm波长的响应度为0.348A/W,900nm波长的响应度为0.054A/W。数值计算和理论分析表明,设计的器件是一种高性能的蓝紫光敏感光电探测器。
Aimed at the requirements of 380 ~ 520nm wavelength detection of biomimetic micro-nano navigation sensors, a blue-violet detector was designed from Lambert theorem. The structure and process of the device were optimized. The thin monocrystalline silicon layer on the SOI wafer achieves high blue-violet responsivity while suppressing the responsiveness of long-wave and near-infrared light in visible light. When the thickness of the SOI silicon device layer is 3 μm, the responsivity at 450 nm wavelength is 0.348 A / W and the responsivity at 900 nm wavelength is 0.054 A / W. Numerical calculation and theoretical analysis show that the designed device is a high-performance blue-violet photosensitive photodetector.