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目的：分析准分子激光系统所发射的能量与整个系统中镜片表面的污染程度之间的关系。方法：以测试ＰＭＭＡ达３．０Ｄ所需能量值作分析。结果：通过三个阶段的实验后发现，随着工作时间的增加，镜片表面污染逐渐严重，该系统出光能量逐渐下降，严重时系统无法工作。结论：通过维护和调试后可以减弱或消除镜片表面的污染，提高系统的出光能量值，保证该系统正常工作。
OBJECTIVE: To analyze the relationship between the energy emitted by an excimer laser system and the degree of contamination of the lens surface throughout the system. Method: Analyze the energy required to test PMMA up to 3.0D. Results: After three stages of experiments, it was found that with the increase of working time, the surface of the lens became more and more serious. The light energy of the system decreased gradually and the system could not work in severe cases. Conclusion: Maintenance and commissioning can reduce or eliminate the pollution of the lens surface and improve the system’s light output energy to ensure the normal operation of the system.