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传统透镜由于其体积大、性能差等因素的制约,使其在微纳光学系统中的应用遇到挑战。金属纳米结构能够耦合自由光波产生表面等离子体激元,通过控制表面等离子体激元来实现对入射光波的调控。V形等离子体纳米天线凭借其双共振效应以及0~2π的全相位调谐范围,使其在可以实现光束调控的金属纳米结构中脱颖而出。首先基于V形纳米天线设计了可以在34μm处高效聚焦的超透镜;接着利用聚焦电子束和光刻工艺制备样品;最后对样品进行表征分析与光学检测。这些工作将促进V形纳米天线在激光直写、光学集成方面的应用。
Due to its large size, poor performance and other factors, the traditional lens poses challenges to its application in the micro-nano optical system. Metal nanostructures are capable of coupling free light waves to generate surface plasmon polaritons and controlling the incident light waves by controlling surface plasmon polaritons. V-shaped plasma nano-antennas stand out from the metal nanostructures that enable beam steering thanks to their double resonance effect and full phase tuning range from 0 to 2π. Firstly, a super lens based on the V-shaped nano-antenna was designed to focus efficiently at 34μm. Then the sample was prepared by focused electron beam lithography and photolithography. Finally, the sample was characterized and analyzed by optical inspection. These efforts will promote the application of V-shaped nano-antennas in laser direct writing and optical integration.