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提出了一种高精度、大行程的原子力显微镜探针结构,可用于测量大面积的微观结构表面.该探针结构包括一个硅悬臂梁和一个环形的预压型压电(PZT)执行器,执行器沿Z轴的行程为70μm,其内部集成了一个具有纳米级分辨率的小型线性编码器,可用于测量PZT执行器的位移.编码器的刻度沿执行器的轴向(Z轴)排列以消除阿贝误差.此线性编码器使原子力显微镜探针PZT执行器的行程范围内具有1nm的分辨率,原子力显微镜探针结构联接有两个线性平移台,可用于X和Y方向扫描样本,扫描面积为50mm(X)×40mm(Y).X向平移台和Y向平移台的移动量可由线性编码器测得,分辨率为纳米级.进行了正弦曲面的测量实验.
A high-precision and large-travel AFM probe structure is proposed, which can be used to measure a large area of the microstructure surface.The probe structure consists of a silicon cantilever beam and a ring-shaped preload piezoelectric (PZT) actuator, Actuator along the Z axis travel of 70μm, which integrates a small nano-scale resolution with a small linear encoder can be used to measure PZT actuator displacement. Encoder scale along the actuator axial (Z axis) arrangement To eliminate Abbe error.This linear encoder has a resolution of 1 nm within the travel range of the AFM probe PZT actuator, and two linear translation stages are attached to the AFM probe structure for scanning in the X and Y directions, The scanning area is 50mm (X) × 40mm (Y). The movement of the X-stage and the Y-stage can be measured by a linear encoder with a resolution of nanometer.