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A novel method to mass-produce PDMS stamps based on nanoimprint
【机 构】
:
NationalKeyLaboratoryofNano/MicroFabricationTechnology
【出 处】
:
高技术通讯:英文版
【发表日期】
:
2006年3期
【基金项目】
:
Supported by the High Technology Resarch and Development Programme of China (No. 2004AA404260).
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