离子敏感场效应晶体管(简称ISFET)是一种用于测量溶液中离子活度的新型电化学敏感器件。一般地说,它是一种栅极被固态离子选择性膜取代的场效应晶体管,具有结构简单、使用广泛的特点。1970年Bergveld第一次提出了用场效应晶体管来制作这种电化学器件并将它用于医学方面的有关测量中。随后,Bergveld和Zemel相继详细地讨论了离子敏感场效应晶体管的工作原理。1978年Buck 在“离子选择电极”综述一文中又对ISFET作了综合评述。离子敏感场效应晶体管的出现,受到人们的极大关注。近几年来,国外很多作者从理论、制作工艺、器件的物理和化学性质以及实验应用等 Ion Sensitive Field-Effect Transistor (ISFET) is a new type of electrochemical sensing device used to measure ion activity in solution. In general, it is a field-effect transistor whose gate is replaced by a solid-state ion-selective membrane, which has the advantages of simple structure and wide usage. Bergveld first proposed in 1970 the use of field-effect transistors to make such electrochemical devices and use it in medical-related measurements. Subsequently, Bergveld and Zemel have discussed in detail the working principle of ion-sensitive field-effect transistors. In 1978, Buck reviewed ISFET comprehensively in his review of “Ion-Selective Electrodes.” The emergence of ion-sensitive field-effect transistors, by the great concern of people. In recent years, many foreign authors from the theory, the production process, the physical and chemical properties of devices and experimental applications