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采用12MeV电子束辐照效应将P+NN+普通整流二极管改制成高频整流二极管,与传统掺金工艺相比,少子寿命控制精确;trr和VF的一致性和重复性好;高温性能明显改善;产品合格率提高30%以上,工艺简单易行。
Adopt 12MeV electron beam irradiation effect to transform P + NN + ordinary rectifier diode into high-frequency rectifier diode. Compared with the traditional gold-doped process, the life control of fewer children is accurate; the consistency and repeatability of trr and VF are good; the performance of high temperature is obviously improved; Rate increased by 30%, the process is simple and easy.