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近年来,对线性测量和检验所采用的这类仪器已提高了精度的要求,并在生产过程中不断扩大其精密仪器的使用。因为这个缘故在动态和振动状态时会遇到检验装置的检查和测试的问题。全苏工具院研制了一种301型装置,对发出连续输出信号仪器进行动态的检验,其频率范围v=1～40赫芝和振幅A=2—40微米。该装置的累计误差(考虑到各种影响的因素)不超过0.2微米。利用干涉试样装置及补偿仪器误差和局部恒温调节的机构,可以保证在检验图内已有同型号仪器中较为高的精度。现有工业生产的各种仪器已在此装置上进行了多次试验。实验结果表明对这类仪器或对其他仪器的线性特性可作预先的推测。而且可确定弹簧测头的振幅频率特性曲线μ(v),
In recent years, such instruments used for linear measurement and inspection have increased the accuracy requirements and continuously expanded the use of precision instruments in the manufacturing process. For this reason there are problems with inspection and testing of the test device during dynamic and vibrational conditions. All-SU Tools Institute has developed a 301-type device that dynamically tests instruments that emit continuous output signals in the frequency range of v = 1-40 Hz and amplitude A = 2-40 μm. The cumulative error of the device (taking into account various factors) does not exceed 0.2 microns. The use of interference sample device and the compensation of instrument error and local thermostat adjustment mechanism, can ensure that in the test map has the same type of instrument in the higher accuracy. A variety of existing industrial instruments have been tested on this device for many times. The experimental results show that the linearity of such instruments or other instruments can be presumed. But also to determine the spring probe amplitude frequency characteristic curve μ (v),