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引言声表面波领域,无论从其基本原理,还有从具体的工艺来讲,都已成熟。声表面波是通过叉指型、加权型、切趾或非切趾型金属换能器在一种合适的压电基片上激励起来,沿基片表面以声速传播一段确定的路程,并在接收端用另一组换能器检测出来。换能器的作用是把射频能量转换成声能(晶格振动),并且,再把声能转换回射频能量。叉指型换能器要在基片表面上激励起声波只有用压电材料做基片才有可能,它还必须满足其它一些条件:例如,声损耗低、耦合效率高、温度灵敏度低和至少有一个方向
Introduction SAW field, both from its basic principles, as well as from the specific process, are mature. Surface acoustic waves are excited by an interdigital, weighted, apodised or apodized metal transducer on a suitable piezoelectric substrate that travels at a sonic velocity along the surface of the substrate for a defined distance and upon reception End with another set of transducers detected. Transducer’s role is to convert radio frequency energy to acoustic energy (lattice vibration), and then the sound energy is converted back to radio frequency energy. Interdigital transducers to excite acoustic waves on the surface of a substrate are only possible with substrates made of piezoelectric material and must fulfill other conditions such as low acoustic loss, high coupling efficiency, low temperature sensitivity and at least There is a direction