一、前言将薄膜工艺用于制作压力传感器,是当前在长时稳定且结构简单的压力传感器方面进行探索的最新成果,它能够保证以很高的精确度将机械量“压力”转换成为电信号。目前人们还只是使用隔膜的机械限值作为确定精确度的因素。不过,这意味着对薄膜结构的电性与机械特性,都有极为严格的要求。下面主要介绍 I. INTRODUCTION The use of thin-film processes for the production of pressure sensors is the latest in an ongoing search for long-term stable and simple-structured pressure transducers that ensures the conversion of mechanical quantities “pressure” into electric signal. At present, people only use the mechanical limit of the diaphragm as a factor to determine the accuracy. However, this means that there is a very strict requirement on the electrical and mechanical properties of the film structure. Here’s the main introduction