【摘 要】
：
A multi-try counter-meshing gears (CMG) discrimination device based on micro electromechani-cal system (MEMS) technology was designed for some specified informa
【机 构】
：
Key Laboratory for Thin Film and Microfabrication of Ministry of Education
【基金项目】
：
国家高技术研究发展计划(863计划)
论文部分内容阅读
A multi-try counter-meshing gears (CMG) discrimination device based on micro electromechani-cal system (MEMS) technology was designed for some specified information fields. The discrimination deviceconsists of two groups of metal CMG, two pawl/ratchet mechanisms, two driving micromotors and two re-setting micromotors, which make the CMG withdraw by raising the pawls. The energy-coupling element isa photoelectric sensor with a circular plate which is notched. Micromotor is fabricated using the ultravioletLiGA (UV-LiGA) fabrication process and precision mechanical engineering. The discrimination device has thefunction which can automatically reset, with the correct resetting code, it can be tried another times.
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