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低成本柔性金属薄片上的异质外延氧化铈薄膜的潜在应用领域有固体燃料电池、气体传感器和光学器件等。利用直流反应磁控溅射法在双轴织构NiW合金衬底上进行Zr掺杂氧化铈薄膜的外延生长研究。结果表明,不同Zr掺杂量的薄膜可通过调制Zr靶上的溅射功率获取,所有样品均为c轴垂直于基片表面生长,显示出良好的外延特性。原子力显微镜分析结果表明,样品表面连续、致密、无裂纹。电子背散射衍射图谱显示Zr0.32Ce0.68O1.84膜具有良好的四重对称面内织构。
Potential applications for heteroepitaxy cerium oxide thin films on low cost flexible foil include solid fuel cells, gas sensors and optics. Epitaxial growth of Zr doped ceria films on biaxially textured NiW alloy substrates by DC reactive magnetron sputtering. The results show that films with different Zr doping amount can be obtained by modulating the sputtering power on the Zr target. All the samples are grown with the c-axis perpendicular to the substrate surface and show good epitaxial characteristics. Atomic force microscopy analysis showed that the sample surface is continuous, dense and crack-free. The electron backscatter diffraction pattern shows that the Zr0.32Ce0.68O1.84 film has good tetragonal symmetry in-plane texture.