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采用金属有机化学气相沉积系统外延了具有三个不同反射中心波长的AlAs/Al0.5Ga0.5As复合分布式布拉格反射镜(DBR),利用透射电镜、X射线衍射仪表征其结构、厚度和组分,利用白光反射谱表征其反射谱强度和带宽。结果表明:该复合DBR比常规DBR和两个反射中心波长复合DBR具有更高的反射谱强度和更宽的带宽。利用该复合DBR制备了AlGaInP发光二级管(LED),尺寸6.0mil×6.0mil(1mil=0.0254mm),并在20mA测试电流下测得其输出光功率为3.54mW,发光效率为17.26lm/W,外量子效率为8.77%,相比常规DBR制备LED输出光功率提高35.1%,相比两个反射中心波长复合DBR制备LED输出光功率提高11.3%。说明具有三个反射中心波长的复合DBR更大幅度地提升了AlGaInP发光二极管的出光效率。
The AlAs / Al0.5Ga0.5As composite distributed Bragg reflector (DBR) with three different central wavelengths of reflection was epitaxial by metal organic chemical vapor deposition system. Its structure, thickness and composition were characterized by transmission electron microscopy and X-ray diffraction. , White light reflectance spectrum was used to characterize the intensity and bandwidth of the reflected spectrum. The results show that the composite DBR has higher reflection spectrum intensity and wider bandwidth than the conventional DBR and two reflection center wavelength composite DBRs. AlGaInP light-emitting diode (LED) with a size of 6.0mil × 6.0mil (1mil = 0.0254mm) was prepared by using the composite DBR. The output power of the AlGaInP LED was 3.54mW at a current of 20mA and the luminous efficiency was 17.26lm / W, the external quantum efficiency is 8.77%, which is 35.1% higher than that of conventional DBR. Compared with two DBR centers, the output power of LED is 11.3% higher. This shows that the composite DBR with three reflection center wavelengths greatly enhances the light extraction efficiency of the AlGaInP LED.