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设计并制作了一种新型的基于Si塑性变形的二维驱动器,驱动器由外围垂直驱动和内部水平驱动两部分组成。驱动器的制作采用普通Si片Si-Si键合技术,首先在结构片正面制作出绝缘填充槽,以实现垂直驱动部分和水平驱动部分的电绝缘,然后利用DR IE干法刻蚀技术释放结构,最后通过Si的塑性变形工艺使驱动器外围垂直驱动部分的可动梳齿和固定梳齿在垂直方向上产生位错,成功制作出二维梳齿驱动器。经测量,驱动器垂直驱动部分可动梳齿和固定梳齿的位错量为19.8μm。
A new type of two-dimensional driver based on Si plastic deformation was designed and fabricated. The driver consists of two parts: the vertical drive and the horizontal drive. The driver is fabricated by using ordinary Si-Si bonding technology. Firstly, an insulating filling groove is fabricated on the front side of the structure to realize the electrical insulation between the vertical driving part and the horizontal driving part, and then the structure is released by DR IE dry etching technology. Finally, the two-dimensional comb-teeth actuator is successfully manufactured by the plastic deformation process of Si, which causes the movable comb teeth and the fixed comb teeth in the vertical driving part of the periphery of the driver to generate the dislocations in the vertical direction. It was measured that the amount of dislocations of the movable comb teeth and the fixed comb teeth in the vertical driving portion of the driver was 19.8 μm.