论文部分内容阅读
利用压电石英晶体设计并制作了一种谐振器型声表面波加速度传感器，并对其性能进行了测试和分析。试验结果表明，采用声表面波谐振器制作成的谐振器型声表面波加速度传感器具有灵敏度高、线性度好的特点，测量精度及短期稳定性等指标均已达到战术级惯性仪器对加速度计的要求，具有很好的发展前景。
A kind of resonator SAW acceleration sensor was designed and fabricated by piezoelectric quartz crystal, and its performance was tested and analyzed. The experimental results show that the SAW accelerometer fabricated by SAW resonator has the characteristics of high sensitivity and good linearity. The measurement accuracy and short-term stability have reached the targets of inertial instrumentation Requirements, with good prospects for development.