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0 前 言 精密计量长光栅为核心的光栅精密位移传感器是高技术领域中迅速发展的新兴技术。它涉及光学、精密机械、微电子技术、感光化学等多门学科领域中有关理论和应用研究的综合技术。 重庆大学自60年代开始研究长光栅技术以来,于1976年、1981年、1987年多次取得光栅技术的科技成果,已设计研制成功了具有国内外先进水平的制造高精度零位长光栅的成套设备。我校首创动态同步刻划零位光栅的工艺方法,研究成功的高精度绝对零位长光栅及其
0 Preface Precise measurement of the long grating as the core grating Precision displacement sensor is a rapidly emerging emerging technology in the field of high technology. It involves the optical, precision machinery, microelectronics, photochemistry and many other fields of theory and applied research integrated technology. Chongqing University since the 60’s began to study the long grating technology, in 1976, 1981, 1987 many times to obtain grating technology, scientific and technological achievements have been designed and developed with the advanced level at home and abroad to create high-precision long grating zero sets equipment. Our school pioneered a dynamic synchronous zero-point grating technology approach to study the successful high-precision absolute zero long grating and its