美国国家标准和技术研究所(NIST)专家研制 成一种专门的程序保障系统,它能查明超纯材料和 合金中存在的极少量杂质。该所提出的程序包分析 了利用光栅扫描电子显微镜收集的资料,这种显微 镜的工作原理可归结为:对被研究样品辐射一电子 束,随后记录反射的电子和二次电子,并且进行X 光分析,除了有关表面轮廓信息之外,还能获得有关 The National Institute of Standards and Technology (NIST) experts have developed a specialized procedural safeguards system that can detect very small amounts of impurities in ultra-pure materials and alloys. The proposed package analyzes data collected using a grating scanning electron microscope. The working principle of such a microscope can be summarized as: irradiating an electron beam to a sample under investigation, followed by recording of reflected electrons and secondary electrons, and X-ray Analysis, in addition to the surface profile information, but also get relevant