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通过高真空磁控溅射仪在Si衬底上成功制备了厚度为30nm的Fe100-xCox系列薄膜,并利用X射线衍射仪、振动样品磁强计和铁磁共振对其结构和磁性质进行了研究.X射线衍射结果表明,Co含量的增加使得Fe100-xCo(x110)晶峰增强,晶格常数减小.磁性测量表明Co的加入使得薄膜在保持较高矩形比的情况下,饱和磁化强度增加,面内易磁化方向的矫顽力增大.当x=0时饱和磁化强度为1.215×10-1T,矫顽力为1.186×104A/m;当x=50时,饱和磁化强度增至1.810×10-1T,同时矫顽力增大至3.342×104A/m.铁磁共振谱的测量结果给出了其磁各向异性的数值和方向,发现随着Co含量的增加,薄膜的磁各向异性有由易平面向易垂直移动的趋势.
The Fe100-xCox thin films with a thickness of 30nm were successfully prepared on Si substrate by high-vacuum magnetron sputtering. The structure and magnetic properties of the films were characterized by X-ray diffraction, vibrating sample magnetometer and ferromagnetic resonance X-ray diffraction results show that the increase of Co content increases the peak of Fe100-xCo (x110) crystal lattice and decreases the lattice constant.Magnetic measurements show that the addition of Co makes the saturation magnetization And the coercivity in the in-plane easy magnetization increases.When x = 0, the saturation magnetization is 1.215 × 10-1T and the coercivity is 1.186 × 104A / m. When x = 50, the saturation magnetization increases 1.810 × 10-1T, while the coercive force increased to 3.342 × 104A / m.The results of ferromagnetic resonance spectroscopy gave the values and directions of the magnetic anisotropy, and found that with the increase of Co content, the magnetic There is a tendency for anisotropy to move vertically from easy plane to easy.